Microfabrication of Heated Nebulizer Chips for Mass Spectrometry
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چکیده
OF DOCTORAL DISSERTATION AALTO UNIVERSITY SCHOOL OF SCIENCE AND TECHNOLOGY P.O. BOX 11000, FI-00076 AALTO http://www.aalto.fi Author Ville Saarela Name of the dissertation Microfabrication of heated nebulizer chips for mass spectrometry Manuscript submitted 18.6.2010 Date of the defence 15.10.2010 Monograph Article dissertation (summary + original articles) Faculty Faculty of Electronics, Communication and Automation Department Department of Micro and Nanosciences Field of research Semiconductor Technology Opponent Prof. Klaus Bo Mogensen Supervisor Prof. Pekka Kuivalainen Instructor Prof. Sami Franssila
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تاریخ انتشار 2010